Nanoscribe Microfabrication System Quantum X algin
Abstract
As part of the project “Maskless 3D Nanofabrication System Based on Two‑Photon Polymerization”, a 3D printing system based on two‑photon polymerization was acquired. This system enables the fabrication of complex 2.5D and 3D microstructures with the highest resolution and accuracy. The integration of next‑generation quantum systems is currently often limited by the constraints of conventional fabrication techniques—especially when hybrid electro‑optical interfaces or intricate microstructures are required that cannot be realized, or only with great difficulty, using standard cleanroom processes. This applies both to research prototypes and to scalable manufacturing.
The new 3D printer is used to integrate the required control structures for spin‑ and atom‑based qubits in a compact form. These systems rely on the precise generation of high‑frequency magnetic and electric fields. In addition, many applications—particularly in biomedical sensing—require integrated microfluidic structures for the controlled handling of liquids. Such geometries are extremely challenging and time‑consuming to produce using traditional planar fabrication methods.
The acquired system enables 3D microfabrication with (sub‑)micrometre resolution at wafer scale, including the direct printing of micro‑optical elements such as lenses, diffraction gratings, and fiber‑optic couplers. To support potential scalability, the system also provides automated alignment of the 3D printing process to existing optical components such as fibers or photonic chips.
Since the 3D printer itself processes only non‑conductive polymers, we combine it with additional techniques—such as 3D aerosol printing—to fabricate the conductive structures required for generating the high‑frequency magnetic and electric fields used for qubit control. We also leverage the system’s high precision to print support structures with variable diameters, thin walls, and high aspect ratios, which serve as form bodies for our established 3D wire‑bonding process using insulated bonding wires. This enables the realization of 2.5D and 3D coil structures that provide significantly improved field homogeneity compared to purely planar designs—an essential requirement for most modern pulsed control sequences.
In summary, the newly acquired 3D printing system is used to develop innovative concepts for the hybrid integration of quantum devices as well as advanced intelligent sensor systems. It substantially expands our technological capabilities and forms the basis for future highly integrated optoelectronic micro‑ and nanosystems.
ERDF funding
Grant under the European Regional Development Fund (ERDF) in Baden‑Württemberg 2021–2027 within the framework of the administrative regulation of the Ministry of Science, Research and the Arts for strengthening research, technological development and innovation at state universities in Baden‑Württemberg (VwV EFRE FEIH 2021–2027)
Project: Maskless 3D Nanofabrication System Based on Two‑Photon Polymerization
Funding reference: 2698214
DFG funding
Grant by the German Research Foundation (DFG) within the “Major Research Instrumentation” program pursuant to Article 91b of the German Basic Law
Project: 3D printer based on two-photon polymerization for maskless microfabrication
Funding reference: INST 41/1234-1 FUGG